Plasma system

The plasma system ATTO from Diener is a versatile system designed to generate plasma from a neutral gas by applying an electric field through a power supply. Inert gases, such as argon, produce excited ions which physically bombard surfaces, removing material through mechanical processes. Conversely, active gases such as oxygen facilitate both ion bombardment and chemical reactions, volatilizing organic compounds and residues for efficient removal. Plasma treatment also allows modification of a surface's chemical composition, depending on the material and the frequency of the plasma power supply.

This technology supports applications such as surface cleaning, activation, etching, and deposition, eliminating the need for harsh chemicals. It is compatible with various materials, including glass, metals, plastics, silicon, and piezoelectric substrates.

At our facility, we use the Diener ATTO plasma system primarily to chemically modify surfaces with air and oxygen plasma, particularly for bonding PDMS to glass. The system is equipped with a 13.56 MHz generator, delivering up to 300 W of power. It features a 10.5-liter chamber and supports air, oxygen, and argon gases for a wide range of treatment processes.

More information about the Diener ATTO plasma system can be found here.