Microscope

The Axioscope 5 Vario optical microscope from Zeiss is equipped with all necessary optical components and software for preliminary visualization and analysis of the microstructured elements and microfluidic chips produced in our facility. The microscope operates with reflected light in both brightfield and darkfield modes, offering enhanced versatility for various sample types. It also features Circular Differential Interference Contrast (c-DIC) in reflected light, improving image contrast and resolution. This is especially important for analyzing surface features of photoresists in master templates or metal layers in microelectrodes, providing rapid feedback on the quality of microstructured samples.
 

Objectives:

• EC Epiplan 5x/0.13 BD M27 (FWD=11.8mm)
• EC Epiplan 10x/0.25 BD M27 (FWD=11.0mm)
• EC Epiplan 20x/0.4 BD M27 (FWD=3.2mm)
• EC Epiplan 50x/0.75 BD M27 (FWD=1.0mm)
• EC Epiplan 100x/0.85 BD M27 (FWD=0.87mm)

Camera:

• Digital Microscopy Camera Axiocam 305 color R2 (D)
  • Number of Pixels: 2464 (H) x 2056 (V) = 5.07 Mega pixels (color)
  • Sensor Type: SONY IMX264 Exmor Pregius Global Shutter CMOS
  • Pixel Size: 3.45 μm x 3.45 μm
  • Chip Size: 8.5 mm x 7.1 mm, equivalent to 2/3" (diagonal 11.1 mm)
  • Spectral Range: Approx. 400 nm to 720 nm (with IR barrier filter)

Illumination:

• Reflected light illumination with a 10W LED
• IF Yellow Filter LP 515 (diameter 25x2mm) for photosensitive materials.

Stage and Specimen Capacity:

The microscope can accommodate specimens up to 160 mm x 160 mm in size and 100 mm in height. The mechanical stage supports 4” and 6” silicon wafers, includes a glass insert for optional bottom illumination, and features a stage holder which can rotate 4” wafers.

Software:

ZEN microscopy software, including analysis tools for adjusting imaging parameters and measuring distances, angles, and other key features.