3D Optical profiler

The Zeta™-20 system from Zeta/KLA Tencor is a fully integrated optical profiling microscope which offers advanced 3D metrology and imaging capabilities. Using the ZDot™ measurement method, which varies focus height, the system captures high-resolution 3D data and true-color infinite focus images for in-depth analysis of microstructure profiles.

The Zeta-20 is equipped with both 2D structured LED illumination and normal LED illumination. The structured illumination enables the detection of surfaces with weak signals (such as transmitting surfaces), making it particularly useful for analyzing transparent materials such as polymers, which are frequently used in our facility for microfluidic chip development.

The system’s lateral resolution depends on the microscope objective, with 5x, 20x, and 50x available. It offers a depth resolution of 10 nm. For enhanced depth resolution, the system features an additional white light interferometer (ZI: VSI) which uses a piezo stage. This interferometric method achieves a depth resolution of 1 nm and supports the use of 10x and 50x interferometric objectives, ideal for optical characterization of sensitive surfaces, such as step heights in photoresist layers during master template production.

More information about the Zeta-20 system can be found here.