Equipment

The Core LOC Facility provides advanced technologies for:

• Photolithography: Precision patterning for microstructures
• Soft Lithography: Flexible fabrication techniques
• Polymer Microstructuring: Custom microfeatures on polymers such as elastomers (e.g., PDMS), photo-curable resins (e.g., SU-8, AZ photoresists), fluoroplastics (e.g., THV), and hydrogels (e.g., polyacrylamide)
• Thin Film Deposition: Uniform coating of silicon wafers and other substrates
• Microfluidics & Droplet Microfluidics: Fluid control and high-speed visualization for lab-on-a-chip systems
• Microstructure Characterization: Comprehensive analysis of microstructures

All equipment is installed in a cleanroom that provides a precisely controlled environment with tightly regulated temperature and humidity, along with minimal particulate contamination, ensuring the precision and reliability required for processes like microfabrication. Find more information about our equipment on the subpages.